Growth and transport in nanostructured materials : reactive transport in PVD, CVD, and ALD / Angel Yanguas-Gil.

This book will address the application of gas phase thin film methods, including techniques such as evaporation, sputtering, CVD, and ALD to the synthesis of materials on nanostructured and high aspect-ratio high surface area materials. We have chosen to introduce these topics and the different appl...

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Bibliographic Details

Online Access:	Full Text (via Springer)
Main Author:	Yanguas-Gil, Angel (Author)
Format:	eBook
Language:	English
Published:	Cham, Switzerland : Springer, [2017]
Series:	SpringerBriefs in materials.
Subjects:	Nanostructured materials > Transport properties. Physical vapor deposition. Chemical vapor deposition. Energy storage. Interfaces (Physical sciences) Materials science. Nanochemistry. Semiconductors. Surfaces (Physics) Surfaces (Technology) Thin films.