Developments in surface contamination and cleaning. Volume 8, Cleaning techniques / edited by Rajiv Kohli and K.L. Mittal.

As device sizes in the semiconductor industries shrink, devices become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a who...

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Bibliographic Details

Online Access:	Full Text (via ScienceDirect)
Other Authors:	Kohli, Rajiv, 1947-, Mittal, K. L., 1945-
Format:	eBook
Language:	English
Published:	Amsterdam : William Andrew, 2015.
Edition:	First edition.
Series:	Developments in Surface Contamination and Cleaning Series ; Volume 8.
Subjects:	Surfaces (Technology) Surface contamination > Prevention. Particles > Measurement. Cleaning. Coatings. Dust control.