Materials science of thin films [electronic resource] : deposition and structure / Milton Ohring.

This is the first book that can be considered a textbook on thin film science, complete with exercises at the end of each chapter. Ohring has contributed many highly regarded reference books to the AP list, including Reliability and Failure of Electronic Materials and the Engineering Science of Thin...

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Bibliographic Details

Online Access:	Full Text (via Knovel)
Main Author:	Ohring, Milton, 1936-
Format:	Electronic eBook
Language:	English
Published:	San Diego, CA : Academic Press, 2002.
Edition:	2nd ed.
Subjects:	Thin films.