Developments in surface contamination and cleaning. Volume 7, Cleanliness validation and verification [electronic resource] / edited by Rajiv Kohli and K.L. Mittal.

As device sizes in the semiconductor industries are shrinking, they become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not as effective at smaller scales. The book series Developments in Surface Contamination and Cleaning a...

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Bibliographic Details

Online Access:	Full Text (via Knovel)
Other Authors:	Kohli, Rajiv, 1947- (Editor), Mittal, K. L., 1945- (Editor)
Format:	Electronic eBook
Language:	English
Published:	Amsterdam : Elsevier, 2015.
Edition:	First edition.
Subjects:	Surfaces (Technology) Surface contamination > Prevention. Cleaning.