Introduction to microfabrication / Sami Franssila.

This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. It demonstrates how common microfabrication principles can be applied in different applications, to create devices ranging from nanometer prob...

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Bibliographic Details

Online Access:	Full Text (via ProQuest)
Main Author:	Franssila, Sami
Format:	Electronic eBook
Language:	English
Published:	Chichester, West Sussex, England ; Hoboken, NJ : John Wiley & Sons, 2010.
Edition:	2nd ed.
Subjects:	Microelectromechanical systems. Electronic apparatus and appliances. Microfabrication. Electronic apparatus and appliances Microelectromechanical systems Microfabrication