Low-k nanoporous interdielectrics : materials, thin film fabrications, structures and properties / authors, Moonhor Ree, Jinhwan Yoon, Kyuyoung Heo.

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Bibliographic Details
Online Access:	Full Text (via ProQuest)
Main Author:	Ree, Moonhor
Other Authors:	Yoon, Jinhwan, Heo, Kyuyoung
Format:	eBook
Language:	English
Published:	Hauppauge, N.Y. : Nova Science Publishers, c2010.
Series:	Nanotechnology science and technology series.
Subjects:	Dielectric films. Microelectronics > Materials. Porous materials. Interconnects (Integrated circuit technology)

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Full Text (via ProQuest)

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Call Number:	TK7871.15.F5
TK7871.15.F5	Available