Digital holography for MEMS and microsystem metrology / edited by Anand Asundi.

Approaching the topic of digital holography from the practical perspective of industrial inspection, "Digital Holography for MEMS and Microsystem Metrology" describes the process of digital holography and its growing applications for MEMS characterization, residual stress measurement, desi...

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Bibliographic Details

Online Access:	Full Text (via ProQuest)
Other Authors:	Asundi, Anand
Format:	eBook
Language:	English
Published:	Chichester : Wiley, ©2011.
Series:	Microsystem and nanotechnology series.
Subjects:	Microelectromechanical systems > Measurement. Microelectronics > Measurement. Holographic testing.