Material Science and MEMS Production : Selected, Peer Reviewed Papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China / edited by Changhui Liu.

Collection of selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China. The 19 papers are grouped as follows: Chapter 1: Materials Science, Processing and Application, Chapter 2: MEMS Design and Production Keyword: Mate...

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Bibliographic Details

Online Access:	Full Text (via ProQuest)
Corporate Author:	International Conference on MEMS and Nanotechnology Shenzhen, China
Other Authors:	Liu, Changhui (Editor)
Format:	Conference Proceeding eBook
Language:	English
Published:	Zurich, Switzerland : Trans Tech Publications, [2014]
Series:	Advanced materials research ; v. 901.
Subjects:	Microelectromechanical systems > Congresses. Nanotechnology > Congresses. Microelectromechanical systems. Nanotechnology. Conference papers and proceedings.