Ultra clean processing of semiconductor surfaces XII : selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium / edited by Paul Mertens, Marc Meuris and Marc Heyns.

Collection of selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), September 21-24, 2014, Brussels, Belgium. The 71 papers are grouped as follows: Chapter 1: Cleaning for FEOL Applications, Chapter 2: Cleaning for FEOL Appl...

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Bibliographic Details

Online Access:	Full Text (via ProQuest)
Corporate Author:	International Symposium on Ultra Clean Processing of Semiconductor Surfaces Brussels, Belgium
Other Authors:	Mertens, Paul (Editor), Meuris, Marc (Editor), Heyns, Marc (Editor)
Format:	Conference Proceeding eBook
Language:	English
Published:	Pfaffikon, Switzerland : TTP, 2014.
Series:	Diffusion and defect data. Solid state phenomena ; v. 219.
Subjects:	Semiconductors > Congresses. Semiconductors. Conference papers and proceedings.