Ultra clean processing of semiconductor surfaces XII : selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium / edited by Paul Mertens, Marc Meuris and Marc Heyns.
Collection of selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), September 21-24, 2014, Brussels, Belgium. The 71 papers are grouped as follows: Chapter 1: Cleaning for FEOL Applications, Chapter 2: Cleaning for FEOL Appl...
Saved in:
| Online Access: |
Full Text (via ProQuest) |
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| Corporate Author: | |
| Other Authors: | , , |
| Format: | Conference Proceeding eBook |
| Language: | English |
| Published: |
Pfaffikon, Switzerland :
TTP,
2014.
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| Series: | Diffusion and defect data. Solid state phenomena ;
v. 219. |
| Subjects: |
| Summary: | Collection of selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), September 21-24, 2014, Brussels, Belgium. The 71 papers are grouped as follows: Chapter 1: Cleaning for FEOL Applications, Chapter 2: Cleaning for FEOL Applications: Beyond-Si Active Area, Chapter 3: Wet Etching for FEOL Applications, Chapter 4: Wet Processing of High Aspect Ratio Structures, Chapter 5: Fluid Dynamics, Cleaning Mechanics, Chapter 6: Photo Resist Performance and Rework, Chapter 7: Cleaning for BEOL Interconnect Applications, Chapter 8: Cleaning for 3D Applications, Chapter 9: Contamination Control and AMC, Chapter 10: Cleaning and Wet Etching for Semiconductor Photo-Voltaic Cells Keyword: Ultra-cleaning, precision cleaning, wet cleaning, Semiconductor Surfaces, contamination control, surface impurities, surface defects, Integrated circuits, Micro-electronic structures, photovoltaic processing, proceedings UCPSS. |
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| Physical Description: | 1 online resource (331 pages) : illustrations. |
| Bibliography: | Includes bibliographical references at the end of each chapters and index. |
| ISBN: | 9783038266266 3038266264 |
| ISSN: | 1662-7799 ; |
| Language: | English. |
| Source of Description, Etc. Note: | Online resource; title from PDF title page (ebrary, viewed October 16, 2014) |