Characterization of Continuous Spatial Particle Atomic Layer Deposition / Julia Marilyn Hartig.
By continuously conveying powder through alternating regions of precursor gas via linear vibration, continuous spatial particle ALD reactors were developed to satisfy the low cost and high throughput requirements of large-scale powder processing applications. While mesoscale and atomic-scale simulat...
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| Format: | Thesis Electronic eBook |
| Language: | English |
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Ann Arbor :
ProQuest Dissertations & Theses,
2022.
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