Silicon semiconductor technology : processing and integration of microelectronic devices / Ulrich Hilleringmann.
The book presents the basic steps and the technical implementation of individual processes for microelectronic circuit integration in silicon. Interaction and influences of e. g. oxidation, etching, doping and thermal processes for integrating CMOS- and Bipolar circuits are discussed in detail, begi...
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Full Text (via Springer) |
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| Format: | Electronic eBook |
| Language: | English |
| Published: |
Wiesbaden :
Springer Vieweg,
2023.
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| Subjects: |