Handbook of thin film deposition [electronic resource] : techniques, processes, and technologies / edited by Krishna Seshan.

The Handbook of Thin Film Deposition is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, new materials for memory...

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Bibliographic Details
Online Access: Full Text (via ProQuest)
Other Authors: Seshan, Krishna
Format: Electronic eBook
Language:English
Published: Waltham [Mass.] : William Andrew, 2012.
Edition:3rd ed.
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Call Number: TK7872.T55 H36 2012
TK7872.T55 H36 2012 Available