Handbook of thin film deposition [electronic resource] : techniques, processes, and technologies / edited by Krishna Seshan.
The Handbook of Thin Film Deposition is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, new materials for memory...
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| Online Access: |
Full Text (via ProQuest) |
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| Other Authors: | |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Waltham [Mass.] :
William Andrew,
2012.
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| Edition: | 3rd ed. |
| Subjects: |
| Summary: | The Handbook of Thin Film Deposition is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, new materials for memory applications and methods for thin film optical processes. In a major restructuring, this edition of the handbook lays the foundations with an up-to-date treatment of lithography, contamination and yield management, and reliability of thin films. The established physical and chemical depo. |
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| Physical Description: | 1 online resource (xviii, 392 pages) |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 1437778747 9781437778748 1283716895 9781283716895 |