Introduction to microelectromechanical systems engineering / Nadim Maluf, Kirt Williams.
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| Online Access: |
Full Text (via IEEE) |
|---|---|
| Main Author: | |
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| Format: | eBook |
| Language: | English |
| Published: |
Boston :
Artech House,
©2004.
|
| Edition: | 2nd ed. |
| Series: | Microelectromechanical systems series.
|
| Subjects: |
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Introduction to microelectromechanical systems engineering /
Published 2004
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Introduction to microelectromechanical systems engineering /
Published 2004
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