Mems and microsystems : design, manufacture, and nanoscale engineering / Tai-Ran Hsu.
Saved in:
| Online Access: |
Full Text (via Skillsoft) |
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| Main Author: | |
| Format: | eBook |
| Language: | English |
| Published: |
Hoboken, N.J. :
John Wiley,
©2008.
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| Edition: | 2nd ed. |
| Subjects: |
| Item Description: | Title from title screen. |
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| Physical Description: | 1 online resource. |
| Bibliography: | Includes bibliographical references and index. |