Handbook of cleaning in semiconductor manufacturing [electronic resource] : fundamentals and applications / Karen A. Reinhardt, Richard F. Reidy.

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Bibliographic Details
Online Access:	Full Text (via Wiley)
Main Author:	Reinhardt, Karen A.
Other Authors:	Reidy, Richard F.
Format:	Electronic eBook
Language:	English
Published:	Salem ; Scrivener ; Hoboken : John Wiley & Sons, Inc., ©2011.
Subjects:	Semiconductors > Surfaces > Cleaning.

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Full Text (via Wiley)

Holdings details from Online
Call Number:	QC611.6.S9 R45 2011
QC611.6.S9 R45 2011	Available