Handbook of silicon semiconductor metrology / edited by Alain C. Diebold.

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Bibliographic Details
Online Access:	Full Text (via Taylor & Francis)
Other Authors:	Diebold, A. C. (Alain C.)
Format:	eBook
Language:	English
Published:	New York : Marcel Dekker, 2001.
Subjects:	Semiconductors > Measurement. Semiconductors > Inspection.

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Holdings details from Online
Call Number:	TK7871.85 .H3337 2001
TK7871.85 .H3337 2001	Available