Bright-chromium linewidth standard, SRM 476, for calibration of optical microscope linewidth measuring systems / Carol F. Vezzetti, Ruth N. Varner, James E. Potzick.

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Bibliographic Details
Main Author:	Vezzetti, Carol F.
Corporate Author:	National Institute of Standards and Technology (U.S.)
Other Authors:	Varner, Ruth N., Potzick, James E.
Other title:	Bright chromium linewidth standard, SRM 476, for calibration of optical microscope linewidth measuring systems.
Format:	Government Document Book
Language:	English
Published:	Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, 1991.
Series:	Standard reference materials. NIST special publication ; 260-114.
Subjects:	Microscopes > Calibration > Standards. Integrated circuits > Masks > Measurement. Chromium > Spectra > Standards.

Norlin Library - Government Information - Microform

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Call Number:	C 13.10:260-114
C 13.10:260-114	Restricted Place a Hold