Surface characterization for computer disks, wafers, and flat panel displays : 28 January 1999, San Jose, California / John C. Stover, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering.
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| Corporate Author: | |
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| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Wash., USA :
SPIE,
©1999.
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| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 3619. |
| Subjects: |
En Route to PASCAL
| Call Number: |
TK7871.85 .S89 1999
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| TK7871.85 .S89 1999 | In transit |