MEMS packaging / edited by Tai-Ran Hsu.
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| Other Authors: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
London :
INSPEC,
©2004.
|
| Series: | EMIS processing series ;
no. 3. |
| Subjects: |
| Physical Description: | xxix, 275 pages : illustrations ; 26 cm. |
|---|---|
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0863413358 : |