Context-based automated defect classification system using multiple morphological masks [electronic resource]

Context-Based; Automated; Defect; Classification; Multiple; Morphological; Masks; Automatic; Detection; Defects; Fabrication; Semiconductor; Wafers; Automated; Classification; Defects; Performed; Manually; Technicians; Novel; Digital; Image; Analysis; Techniques; Generate; Unique; Feature; Vector; D...

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Bibliographic Details

Online Access:	Online Access
Main Authors:	Sari-Sarraf, Hamed (Author), Hunt, Martin A. (Author), Gleason, Shaun S. (Author)
Corporate Author:	Lockheed Martin Energy Research Corp (Researcher)
Format:	Government Document Electronic eBook
Language:	English
Published:	Oak Ridge, Tenn. : Oak Ridge, Tenn. : Lockheed Martin Energy Research Corp. ; distributed by the Office of Scientific and Technical Information, U.S. Department of Energy, 2002.