Frontiers of characterization and metrology for nanoelectronics [electronic resource] : 2007 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics : Gaithersburg, Maryland, 27-29 March 2007 / editors, David G. Seiler [and others] ; sponsoring organizations, National Institute of Standards and Technology [and others]
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Full Text (via Scitation) |
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| Other title: | Available from some providers with title: Characterization and metrology for nanoelectronics : 2007 International Conference on Frontiers of Characterization and Metrology. Characterization and metrology for ULSI technology. |
| Format: | Electronic Conference Proceeding eBook |
| Language: | English |
| Published: |
Melville, N. Y. :
American Institute of Physics,
2007.
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| Series: | AIP conference proceedings ;
no. 931. |
| Subjects: |
Internet
Full Text (via Scitation)Online
| Call Number: |
TK7874.76
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| TK7874.76 | Available |