Modelling of Microfabrication Systems / by Raja Nassar, Weizhong Dai.

This book addresses modeling of systems that are important to the fabrication of three-dimensional microstructures. Selected topics are ion beam micromachining, x-ray lithography, laser chemical vapor deposition, photopolymerization, laser ablation, and thin films. Models simulating the behavior of...

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Bibliographic Details

Online Access:	Full Text (via Springer)
Main Author:	Nassar, Raja
Other Authors:	Dai, Weizhong
Format:	eBook
Language:	English
Published:	Berlin, Heidelberg : Springer Berlin Heidelberg, 2003.
Series:	Microtechnology and MEMS.
Subjects:	Engineering. Numerical analysis. Electronics. Nanotechnology.