Microlithographic techniques in IC fabrication : 25-26 June, 1997, Singapore / Soon-Fatt Yoon, Raymond Yu, Chris A. Mack, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SPIE Singapore Chapter, Institute of Physics Singapore ; cosponsored by SPIE Japan Chapter [and others] ; cooperating organizations Nanyang Technological University (Singapore) [and others]
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| Corporate Authors: | , , , , |
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| Other Authors: | , , |
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Washington :
SPIE,
©1997.
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| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 3183. |
| Subjects: |
PASCAL Offsite
| Call Number: |
TK7835 .M435 1997
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| TK7835 .M435 1997 | Available Place a Hold |