Introductory MEMS [electronic resource] : fabrication and applications / Thomas M. Adams, Richard A. Layton.

Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on ME...

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Bibliographic Details

Online Access:	Full Text (via Springer)
Main Author:	Adams, Thomas M. (Thomas McDaniel)
Other Authors:	Layton, Richard A.
Format:	Electronic eBook
Language:	English
Published:	New York : Springer, ©2010.
Subjects:	Microelectromechanical systems. Electronic apparatus and appliances. Transducers.