The Physics of Submicron Lithography / by Kamil A. Valiev.
This monograph details the physics behind the methods of generating submicron forms for electron beam, ion beam, optical, and X-ray lithography. Topics are discussed at the level of analytical theory, allowing a study of scientific issues in the field without frequent reference to a general physics...
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| Online Access: |
Full Text (via Springer) |
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| Main Author: | |
| Format: | eBook |
| Language: | English |
| Published: |
Boston, MA :
Springer US : Imprint : Springer,
1992.
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| Series: | Microdevices, Physics and Fabrication Technologies.
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| Subjects: |
Table of Contents:
- 1. Forming Electron Beams of Submicron Cross Section
- 2. The Physics of the Interactions between Fast Electrons and Matter
- 3. The Physics of Ion-Beam Lithography
- 4. The Physics of X-Ray Microlithography
- 5. Optical Lithography
- 6. Procedures for Processing Exposed Resist Films and Resist Mask Topography.